EBSD

General EBSD

This describes the metadata which applies to EBSD experiments. EBSD is a technique where electrons are fired at a sample and the scattering of the electrons is analysed.

Adjustable Parameters

• Alloy elements (One or more of: Ti, Al, V etc.)
• Sample Orientation Out of Plane (Z1) - (One of: ND(Normal), RD(Rolling), TD(Transverse), CD(Compression), R1(Radial 1), R2(Radial 2), FD(Forging), DD(Draw), ED(Extrusion), RD(Radial), AD(Axial))
• Sample Orientation Up, North (Y1) - (As above)
• Sample Orientation Side, East (X1) - (As above)
• Phase name (One or more of: Ti Hex, Ti Beta, Ti Cubic, Al Cubic etc.)
• Crystal System - (One of: Hexagonal, Cubic)
• Crystal Space Group - (Number)
• Crystal Laue Group - (Text)
• Reflectors - (Number - Default: 40)
• Material Description - (Text)
• Sample Processing Route - (Free text e.g. Rolling, Cast, Uniaxial Compression, Plane Strain, Tension, Forging)
• Tilt - (Number - Default: 70)
• Working Distance (mm) - (Number)
• Magnification - (Free Number)
• Beam Energy (kV) - (Number - Default: 20)
• Step Size (micrometers) - (Number)
• EBSD Exposure Time (milliseconds) - (Number)
• Overlap of stitched maps (Perentage) - (Number)

Other notes

• Other notes - (e.g. Stage scan?)
• Storing diffraction patterns?
• Storing chemical composition?

Setup Specific Metatdata

There are several different microscope setups which have the above data in common but also have some instrument specific metadata.

TESCAN

• Camera: Oxford Symmetry
• Camera Insertion Distance: 178 mm
• Beam Intensity - (Default: 20) - analagous to probe current.
• Scan Mode - (Resolution, Depth, Field, Wide Field, Channeling)
• Camera Mode - (Resolution, Sensitivity, Speed 1, Speed 2)

FEI Sirion

• Camera: Oxford NordlysNano
• Camera Insertion Distance: 164.8 mm
• Spot Size - (Default 4, range, integer 1 to 7)
• Aperture - () Combination of the aperture and the spot size is analagous to probe current.
• Binning Mode - (Default 4x4, (1x1, 2x2, 4x4, 8x8, 8x16))
• Gain - (Default: Low, High)